Semiconductor Equipment
Beneq Transform®
Versatile, automated ALD solution for high-throughput production.
Equipment
Transform Tech Specs
Transform®
Transform® Lite
Maximum configuration
3 ALD modules & 1 pre-heater
2 ALD modules & 1 pre-heater
Preheating capability
Yes
Yes
Transfer module
Brooks Mx600SS
Brooks Mx400
Cooling option
Built-in
Facet-mounted
VCE loadlocks
2
1
Substrate Size
75, 100, 150, or 200 mm
75, 100, 150, or 200 mm
Substrate
Si, GaN-on-Si, GaAs, InP, SiC, GaN, LNO, Sapphire
Si, GaN-on-Si, GaAs, InP, SiC, GaN, LNO, Sapphire
Maximum configuration dimensions
3000 x 3000 x 2250 mm
3000 x 1250 x 2250 mm
Integration
SECS/ GEM
SECS/ GEM
Transform®
Maximum configuration
3 ALD modules & 1 pre-heater
Preheating capability
Yes
Transfer module
Brooks Mx600SS
Cooling option
Built-in
VCE loadlocks
2
Substrate Size
75, 100, 150, or 200 mm
Substrate
Si, GaN-on-Si, GaAs, InP, SiC, GaN, LNO, Sapphire
Maximum configuration dimensions
3000 x 3000 x 2250 mm
Integration
SECS/ GEM
Transform® Lite
Maximum configuration
2 ALD modules & 1 pre-heater
Preheating capability
Yes
Transfer module
Brooks Mx400
Cooling option
Facet-mounted
VCE loadlocks
1
Substrate Size
75, 100, 150, or 200 mm
Substrate
Si, GaN-on-Si, GaAs, InP, SiC, GaN, LNO, Sapphire
Maximum configuration dimensions
3000 x 1250 x 2250 mm
Integration
SECS/ GEM
ALD Batch Process Module
Batch size
1, 10 or 25 wafers, up to 200 mm
Safety standards
SEMI S2 and S8
ALD processes
Al2O3, HfO2, Ta2O5, TiO2, SiO2, AlN, TiN (Others and metals to be released)
Processing temperature
Up to 420 °C
Liquid source lines
4
Ammonia (NH3) gas line
Optional
Ozone gas line
Optional
Process control
Recipe-based; fully configurable
ALD Plasma Process Module
Single wafer
Up to 200 mm
Safety standards
SEMI S2 and S8
ALD processes
AlN, Si3N4, SiO2, Al2O3 (Others and metals to be released)
Processing temperature
Up to 420 °C
Liquid source lines
4
Plasma gas lines
N2, O2
Plasma pretreatment
Yes
Ammonia (NH3) gas line
Optional
Ozone gas line
Optional
Process control
Recipe-based; fully configurable
