Spatial ALD Equipment

Roll-to-roll or rotary ALD systems for flexible substrates in R&D and production. Custom-build based on your specific requirements.

Genesis ALD

World’s only commercially available roll-to-roll ALD system. Functional ALD coatings for batteries, solar, and flexible electronics. The Genesis ALD is ideal for coating any roll-format substrates, and for multiple functional applications.

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Beneq C2R

Wafer plasma batch processing is revolutionized through this rotary, spatial ALD tool. By doing away with pulsing and purging of precursors, the substrate rotates through various reactive and purging zones to achieve unparalleled throughput and simplicity.

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