Beneq C2R
Ultra-fast high precision spatial ALD coatings
Ultra-fast high precision spatial ALD coatings
Beneq C2R provides an optimal solution for high performance ALD in industrial applications, such as optical coatings and barriers. The Beneq C2R is the ideal product when speed, cost, low process temperature, and the highest possible film quality are the driving factors.
Dr. Andreas Wienke, Laser Zentrum Hannover (LZH)
The Beneq C2R features an automation option based on the trusted MX400 transfer module by Brooks Automation. Included in the automation offer:
Learn more about Beneq’s Development Service. Visit our FAQ page for expert guidance.
Learn moreIf you are an existing customer seeking support, upgrades or spare parts, please use our Support form.