Beneq is the most installed ALD equipment provider for academic research and corporate R&D. Our products have been designed to minimize cross contamination in a multi-user research environment. Wide range of options and upgrades for the most demanding research requirements.
| Product | TFS 200  | TFS 500  | |
|---|---|---|---|
| Dimensions | 720 x 1340 x 1280 mm | 1600 x 900 x 1930 mm | |
| Chamber volume | 200 x 95 mm (diameter x height) | 200 x 170 mm (diameter x height) | |
| Usage | Research, Production | Research, Production | |
| Integration | Cluster | Cluster | |
| Temperature Range | 25-500 °C | 25 – 500 °C | |
| Very Low Vapor Pressure Precursors | Yes | Yes |
Learn more about Beneq’s Development Service. Visit our FAQ page for expert guidance.
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