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Beneq is the global leader in industrial and research atomic layer deposition (ALD) equipment since 1984.

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Semiconductor equipment

Automated ALD solutions for high-capacity wafer production.

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Largest scale, general purpose ALD production systems ideal for coating diverse substrate types and thick films.

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Premium, highly flexible ALD research equipment dedicated to academic research and corporate R&D.

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Large-area, roll-to-roll atomic layer deposition systems for flexible substrates in R&D and production.

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High-performance ALD coating solutions for your market’s interfacial engineering and device optimization challenges.

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Atomic Layer Deposition

What if you could manipulate matter at the nano scale? What if you could build things up a layer of atoms at a time? Wonder no more. Welcome to Atomic Layer Deposition.

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Home of ALD

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Atomic Layer Deposition

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