Home of ALD
In 1984 we started the world’s first industrial production using atomic layer deposition (ALD). Today, Beneq is the most recognized provider of ALD equipment and R&D services. Our mission is to create premium tools for production and for research, and to enable technology mega trends through industrial ALD solutions.
Products
Find your tool
Batch Production
Largest scale, general purpose ALD production systems ideal for coating diverse substrate types and thick films.
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Spatial ALD
Large-area, roll-to-roll atomic layer deposition systems for flexible substrates in R&D and production.
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Our expertise at your service
Coating service
The fastest way to market with a new ALD solution is to outsource the production to Beneq. Beneq coating services is a great way to explore the high-performance ALD technology and thin film coatings with a low threshold and limited risk.
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If you want to improve your products with Atomic Layer Deposition and ALD services, selecting the right partner is easy: Beneq brings you over thirty years of thin film experience and the world’s largest ALD-dedicated production facility.
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Latest news
Laser Zentrum Hannover (LZH) extends optical coating capabilities to include ultrafast ALD depositions with the Beneq C2R
Read more LZH and Beneq set the stage for ultrafast ALD adoption in optics industry
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Utilizing a Thin-Film ALD Design as Anti-Reflective Coating Alternative for Minimizing Ghost Images and Flare
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