Home of ALD

In 1984 we started the world’s first industrial production using atomic layer deposition (ALD). Today, Beneq is the most recognized provider of ALD equipment and R&D services. Our mission is to create premium tools for production and for research, and to enable technology mega trends through industrial ALD solutions.

Products

Find your tool

Research

Premium, highly flexible ALD research equipment dedicated to academic research and corporate R&D.

Read more

Semiconductors

Automated ALD solutions for high-capacity wafer production.

Read more

Batch Production

Largest scale, general purpose ALD production systems ideal for coating diverse substrate types and thick films.

Read more

Spatial ALD

Large-area, roll-to-roll atomic layer deposition systems for flexible substrates in R&D and production.

Read more

Services

Our expertise at your service

Coating service

The fastest way to market with a new ALD solution is to outsource the production to Beneq. Beneq coating services is a great way to explore the high-performance ALD technology and thin film coatings with a low threshold and limited risk.

Read more

R&D service

If you want to improve your products with Atomic Layer Deposition and ALD services, selecting the right partner is easy: Beneq brings you over thirty years of thin film experience and the world’s largest ALD-dedicated production facility.

Read more

Support

Beneq’s support team helps you in all aspects of owning an ALD tool. Whether it is spare parts, maintenance, training or an upgrade of your ALD tool, we got you covered.

Read more

Newsroom

Latest news

Utilizing a Thin-Film ALD Design as Anti-Reflective Coating Alternative for Minimizing Ghost Images and Flare

Read more

Beneq’s growth continues by expanding its workforce by nearly 40 percent – encouraging more students to join the sector 

Read more

ALD TechDay Forum 2022 – Event Recap

Read more
Contact us