Home of ALD

In 1984 we started the world’s first industrial production using atomic layer deposition (ALD). Today we are the most recognized provider of ALD equipment and R&D services. Our mission is to create premium tools for production and for research, and to enable technology mega trends through industrial ALD solutions.

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Select your industry and application. Or contact us for more information.

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MEMS
Power Devices
Radio Frequency (RF) Devices
Optoelectronics, LED, and Image Sensors
Advanced Packaging
Semicon Equipment Part Coating
Scintillators
PCB
University and Research
Optical Coatings
Mints, Jewelry
OLED Encapsulation
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Products

Find your tool

Research

Premium, highly flexible ALD research equipment dedicated to academic research and corporate R&D.

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Wafer Fab

Automated ALD solutions for high-capacity wafer production.

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Batch Production

Largest scale, general purpose ALD production systems ideal for coating diverse substrate types and thick films.

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Spatial ALD

Large-area, roll-to-roll atomic layer deposition systems for flexible substrates in R&D and production.

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Services

Our expertise at your service

Coating service

The fastest way to market with a new ALD solution is to outsource the production to Beneq. Beneq coating services is a great way to explore the high-performance ALD technology and thin film coatings with a low threshold and limited risk.

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R&D service

If you want to improve your products with Atomic Layer Deposition and ALD services, selecting the right partner is easy: Beneq brings you over thirty years of thin film experience and the world’s largest ALD-dedicated production facility.

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Support

Beneq’s support team helps you in all aspects of owning an ALD tool. Whether it is spare parts, maintenance, training or an upgrade of your ALD tool, we got you covered.

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Newsroom

News, blogs, and more

New clean room facility completed

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Webinar: Enhancing Yield by Minimizing Contamination

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Webinar: Conformal Optical Coatings with Atomic Layer Deposition

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Improving Curved uOLED encapsulation with ALD

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Do you have an inquiry?

Contact our team of experts to get more information, request a sample, or ask for a quote.

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