Home of ALD

In 1984 we started the world’s first industrial production using atomic layer deposition (ALD). Today we are the most recognized provider of ALD equipment and R&D services. Our mission is to create premium tools for production and for research, and to enable technology mega trends through industrial ALD solutions.

Products

Find your tool

Research

Premium, highly flexible ALD research equipment dedicated to academic research and corporate R&D.

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Semiconductors

Automated ALD solutions for high-capacity wafer production.

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3D & Batch

Largest scale, general purpose ALD production systems ideal for coating diverse substrate types and thick films.

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Spatial ALD

Large-area, roll-to-roll atomic layer deposition systems for flexible substrates in R&D and production.

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Services

Our expertise at your service

Coating service

The fastest way to market with a new ALD solution is to outsource the production to Beneq. Beneq coating services is a great way to explore the high-performance ALD technology and thin film coatings with a low threshold and limited risk.

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R&D service

If you want to improve your products with Atomic Layer Deposition and ALD services, selecting the right partner is easy: Beneq brings you over thirty years of thin film experience and the world’s largest ALD-dedicated production facility.

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Support

Beneq’s support team helps you in all aspects of owning an ALD tool. Whether it is spare parts, maintenance, training or an upgrade of your ALD tool, we got you covered.

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Newsroom

Latest news

Beneq unveils two new ALD products for 300mm and compound semiconductor device fabrication respectively

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Join Beneq at SEMICON Japan 2021

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Beneq Transform® charges forward with significant growth in More-than-Moore markets  

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