Beneq is the most installed ALD equipment provider for academic research and corporate R&D. Our products have been designed to minimize cross contamination in a multi-user research environment. Wide range of options and upgrades for the most demanding research requirements.
Compact. Scalable. Perfect for starting your research journey with ALD. It is expandable with optional modules ranging from 3D chamber, plasma ALD and particle coating capabilities. Available at EUR 130,000.See product
Beneq TFS 200
ALD tool with a dual chamber structure and all metal sealing surfaces for minimal cross contamination. The TFS 200 straddles research and production with vast array of options and automation. Inert gas valving prevents precursor residues from entering the reaction chamber ensuring short ALD cycles.See product
Beneq TFS 500
Featuring all the capabilities of the TFS 200, the TFS 500 has the same capabilities on a grander scale. The larger reaction chamber makes it capable to process 300 mm wafers, solar cells and powders. Front access allows for easy loading and unloading of medium to large 3D objects.See product