About Beneq

Who we are

Beneq is the home of atomic layer deposition. In 1984, we established the world’s first industrial production using ALD. Today, we lead the market with products for R&D (TFS 200, TFS 500, R2), semiconductor device fabrication (Transform TM), 3D and batch production (P400A, P800, P1500), ultra-fast spatial ALD (C2R), and roll-to-roll ALD (Genesis).

Beneq’s unique Development Service simplifies customer adoption and proof-of-concept for new ALD processes, while our Coating Service cuts down time to market by outsourcing state of the art ALD production. Our team of engineers and experts is dedicated to making ALD tools accessible for researchers.

At Beneq, we harness ALD to enable technology megatrends.

Discover our Products

Wafer fabrication

3D and batch production

Research

Spatial ALD

Explore our Markets and Applications.

Learn more about our Services

R&D service

Coating service

Join us

Want to join team Beneq?

We are material scientists, designers, engineers, and more. Find out our current vacancies.

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