Spatial ALD equipment

Genesis ALD

World’s only commercially available roll-to-roll ALD system

Genesis ALD

MARKETS AND APPLICATIONS

Functional ALD coatings for batteries, solar, and flexible electronics. The Genesis ALD is ideal for coating any roll-format substrates, and for multiple functional applications.

  • Passivation of cathodes and anodes for various types of lithium-ion and solid-state batteries
  • Conductive layers and encapsulation for flexible solar cells
  • Moisture barriers for flexible electronics

Learn how ALD enables safer and higher performance batteries

MATERIAL SELECTION

Wide selection of ALD materials to meet your requirement. For years Beneq has pioneered roll-to-roll ALD systems for R&D and industrial production. Our common materials include Al₂O₃, TiO₂, ZnO, ZnS, SiO₂, or any other material on request.

FEATURE HIGHLIGHTS

  • Web width: max. 420mm
  • ALD coating thickness: max. 100nm
  • Dynamic deposition rate (Al2O3): 10 nm *m/min
  • Process temperature: max. 250°C

See Tech Specs

CUSTOMIZATION

At maximum 420mm web width, the Genesis ALD is suitable for lab R&D or pilot scale production. Designed to handle ALD films onto flexible substrates such as polymer or metal. Working with our partner E+R Group, the leading roll-to-roll vacuum coater company, we offer customers optional designs for wider webs and line integration.

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