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Spare Parts and Upgrades
All Beneq products have been designed with flexibility and usability in mind. With the right options and upgrades you will always have the optimal equipment setup that will grow with you. The right configuration will also help you to decrease your valuable production downtime, maintenance, and repair costs. Below you will find more information about the many options and upgrades available.

Plasma-enhanced ALD (PEALD)
For TiN, SiO2, Al2O3 and SiN processes and high-speed processing.
Learn moreQuadruple Mass Spectrometer (QMS)
For process development, DBR process monitoring and system leak checking.
Learn more