Throughput Revolution

Next level of wafer capacity for ALD equipment

Beneq is on a mission to introduce ALD to a whole new set of industrial applications. Earlier, we have talked about fast ALD, spatial ALD solutions and next generation ALD equipment that changes the standards of throughput for industrial ALD production.

Next, our plan is to start a throughput revolution in ALD for the semiconductor industry.

Beneq already offers a whole range of services for industrial processing of wafers and automated batch wafer equipment for high volume manufacturing. Beneq also provides many spatial ALD solutions that are suitable for high volume manufacturing of wafer coatings in the semiconductor and MEMS industry.

But there is more to come. In Semicon Europa in November, we will introduce our latest new equipment for wafer ALD, with special focus on emerging ALD markets, such as Power and RF devices, MEMS and piezoelectric sensors and actuators, RF MEMS and image sensors, LED and OLED. Make sure to follow the news!

If you are planning to visit Semicon Europa, you should find the time to come and meet us (Hall B1, stand 1767). You can also visit our Semicon Europa event web page and book a meeting with our team.

We are looking forward to seeing you in Munich.

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