Beneq Science Letters

Efficient surface passivation of black silicon using spatial atomic layer depostion

In this work we show that surfaces of nanostructured silicon (black silicon, b-Si) can be passivated with Al2O3 using industrially viable line speeds in a prototype Spatial ALD reactor Beneq SCS 1000. Charge carrier lifetimes up to 1.25 ms were obtained, which were slightly higher than with temporal ALD
passivation on similar wafers (0.94 ms).

Beneq Roll-to-Roll ALD in Practice

The demand for flexible ultra-high moisture barrier films can be met with roll-to-roll (R2R) atomic layer deposition (ALD). Here the deposition of Al2O3 barriers on polymer films with a Beneq WCS 600 R2R ALD system is shown. The obtained water vapor transmission rates (WVTR) were below the detection limit of 5 * 10-4 g/m² /day of Mocon Aquatran 1 (38 °C /90% RH) on PEN.

Anti-reflective coatings for laser wavelengths

Optical applications by Atomic Layer Deposition (ALD) are demonstrated by anti-reflective coatings at laser wavelengths. Three wavelengths spanning from deep ultraviolet (266 nm) to visible (633 nm) and infra-red (1064 nm) regions are presented.

Atomic layer deposition into ultra-high aspect ratio structures with a stop-flow ALD reactor

The structures requiring conformal thin films are continuously becoming more demanding. New technical solutions are needed to meet the requirements. Here the growth of ALD Al2O3 and TiO2 in ultra-high aspect ratio structures is shown with a Beneq TFS 200 ALD reactor equipped with a high aspect ratio stop-flow module. The highest achieved aspect ratios for ALD Al2O3 and TiO2 films were 1:3000 and 1:2000.

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Application examples

  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq aerosol thin film equipment is ideal for AR coatings on solar glass.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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