Flexible organic light-emitting diodes (OLEDs) on continuous plastic film have been successfully fabricated using...
Research World
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Welcome to the Beneq Thin Film Research pages!
In this area, we have collected ALD and aerosol coating research information, from our own science letters and thin film research equipment to links to ALD research and publications performed with Beneq ALD equipment elsewhere.
We hope you find the pages useful. We plan to add more material here continuously. We invite you to come back and check the latest news regularly. If you have any feedback or ideas about what else we should present on these pages, please let us know.
Latest Beneq Science Letters
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15 Feb -
4 DecSilicon nitride deposition process using plasma enhanced ALD (PEALD) technique is demonstrated in this work.
Our Most Popular Research Equipment
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Research With Beneq Equipment
Beneq is a leading provider of thin film research equipment and ALD reactors for research and development purposes. A multitude of universities and industrial research laboratories use Beneq equipment for advanced thin film research every day.
On this listing, we have collected examples of academic research perfomed with Beneq equipment around the world. The list is by no means complete. If you have used Beneq reactors in your own research or know publications that include research with Beneq ALD or aerosol thin film equipment that are missing from the list, please let us know. We would happy to update the list accordingly.
Application examples
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Chip-Level Moisture Barrier
The challenge The device did not pass the highly accelerated stress test (HAST), which tests the device performance after long term high humidity high temperature exposure. The side-walls of the device had to be protected against moisture. The customer... -
Anti-Corrosion Coating for Semi Equipment Parts
The challenge The fluorine plasma used in semiconductor process equipment causes corrosion in the chamber parts. The existing protective coatings were porous and had particle generation issues inside the wafer processing chamber. The parts are complex... -
Gate Dielectric for GaN Power Devices
The challenge GaN power devices need conformal high quality insulator as the gate dielectric. The customer A leading GaN power semiconductor device manufacturer Beneq solution A conformal 15 nm ALD coating of Al2O3 deposited as the gate dielectric for a... -
Gate Insulator for Oxide-TFT Display
The challenge Use of Oxide Thin Film Transistor (O-TFT) technology in modern display manufacturing requires a highly conformal and pinhole-free gate dielectric with low hydrogen content. Customer had to find an alternative for PECVD, which was not... -
Encapsulation of OLED microdisplays
Beneq developed a thin-film encapsulation nanolaminate coating for a leading Asian OLED microdisplay manufacturer to enable long lifetime for their microdisplays. -
Insulator for thin film EL displays
An ALD nanolaminate film was developed for Lumineq displays to create a fully pin-hole free thin film insulator layer. -
Top electrode for transparent display
Beneq developed an ALD Transparent Conductive Oxide (TCO) for Lumineq's electroluminescent displays to replace the sputtered IDO that was used in the transparent top electrode. -
Moisture protection of PCBs
Beneq developed a low-temperature ALD moisture barrier solution for a leading supplier of electronics for personal safety monitoring to protect the sensitive circuit board components from moisture. -
Encapsulation of phosphor powder
Beneq provided a moisture barrier solution using ALD for FBR (fluidized-bed reactor) for a leading phosphor material manufacturer to protect the sensitive phosphor powders used in LED lighting from moisture. -
Anti-corrosion coating for LED packaging
Beneq's ALD coating solution solved a leading LED manufacturer's silver reflector corrosion problem by both applying ALD to coat the semi-finished wire-bonded LED assemblies, and by protecting the silver surface with nSilver. -
Anti-reflection coating for solar glass
Beneq and DSM created a production scale solution using DSM AR coating material and Beneq nFOG aerosol technology for a leading solar glass manufacturer to reduce light reflection on solar panels. -
Metal-like coatings for watch parts
Beneq developed a thin ALD-based optical coating for a leading watch parts manufacturer to both provide a specific color and to protect from corrosion. -
Wafer-level moisture barrier for LED
Beneq provided moisture coating using TFS 200 for a leading LED manufacturer to protect LED dies from moisture and prevent oxidation. -
Bottom DBR for LED lighting
Beneq developed a multi-layer DBR structure on a patterned surface for a leading LED manufacturer. -
Filling of diffractive gratings
Beneq used ALD coating to fill diffractive gratings for a leading optical system manufacturer to keep the gratings free from debris and boost their optical performance. -
Anti-corrosion coating for sensors
The highly conformal and pin-hole free ALD coating solved a leading sensor manufacturer's sensor corrosion problems without compromising sensor sensitivity. -
Buffer layer for CIGS solar panel
Beneq developed a thin, cadmium-free ALD buffer for the solar panels of a leading CGIS solar panel manufacturer. -
Protective coating for Li-ion batteries
Beneq's ultra-thin ALD coating solved a leading Li-ion battery manufacturer's battery corrosion challenges by reducing the fading of battery capacity caused by repeated charge and unload cycles. -
Anti-tarnishing coating for jewelry
Beneq helped Kalevala Jewelry in preventing the discoloration of silver surfaces by providing the patented nSilver industrial-scale protection solution for an ultra-thin, totally conformal, and fully transparent anti-tarnish coating. -
Optical NIR filter on a glass cylinder
Beneq developed a customized batch ALD process for a CCD sensor -based industrial vision systems supplier to coat their near-infrared (NIR) filters. -
Optical coatings for high power laser lenses
Benq developed a conformal high- and low-index multilayer optical coating for a leading provider of high power laser optics and coatings using the TFS 500 batch ALD system. -
Coating of Microchannel Plates (MCP)
Beneq developed an ALD coating solution for microchannel plates (MCP) for Incom, Inc., the world’s largest supplier of rigid fused fiber optics, to allow for significantly greater secondary electron emission . -
Thin-film encapsulation of OLED lighting
Beneq developed a conformal, dense, and pinhole-free Al2O3 and TiO2 barrier coating for a leading OLED lighting panel manufacturer to protect OLED panels from humidity. -
Thin film encapsulation of scintillator plates
Beneq developed a conformal, dense, and pinhole-free low temperature Al2O3 and TiO2 barrier coating for a leading scintillator plate manufacturer to protect scintillator materials from moisture and increase product lifetime and reliability.
