Research World

Welcome to the Beneq Thin Film Research pages!

In this area, we have collected ALD and aerosol coating research information, from our own science letters and thin film research equipment to links to ALD research and publications performed with Beneq ALD equipment elsewhere.

We hope you find the pages useful. We plan to add more material here continuously. We invite you to come back and check the latest news regularly. If you have any feedback or ideas about what else we should present on these pages, please let us know.

Beneq Science Letters

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Research With Beneq Equipment

Beneq is a leading provider of thin film research equipment and ALD reactors for research and development purposes. A multitude of universities and industrial research laboratories use Beneq equipment for advanced thin film research every day.

On this listing, we have collected examples of academic research perfomed with Beneq equipment around the world. The list is by no means complete. If you have used Beneq reactors in your own research or know publications that include research with Beneq ALD or aerosol thin film equipment that are missing from the list, please let us know. We would happy to update the list accordingly.


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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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