Hot source HS 500

The hot source HS 500 options support the versatility and modularity of the TFS 200 research platform in the following ways:

  • Excellent for ALD precursor chemistry research
  • Enables use of precursors with very low vapor pressure (e.g. HfCl4, ZrCl4, beta-diketonates, amides, cyclopentadienyl, etc.)
  • Small precursor quantities
  • Easy and fast precursor filling and fast heating time
  • Hot source HS 500 enables the use of precursors and processes that require higher temperatures than the HS 300 can accommodate
  • Fast precursor loading and unloading


Hot source HS 500

  • for low vapor pressure liquids and solids
  • enables precursor heating up to 500°C
  • heated delivery line prevents precursor condensation
  • very easy precursor change
  • 5 ml glass crucible included
  • water-cooled casing for safety
  • for corrosive high-temperature processes a stainless steel reaction chamber is needed.

Precursor crucible for HS 500

  • Container for precursor chemical
  • Two material options, borosilicate glass and quartz
  • HS-500-PC/B: Material borosilicate glass, up to 350 °C
  • HS-500-PC/Q: Material Quartz, up to 500 °C


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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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3 + 8 =
Solve this simple math problem and enter the result. E.g. for 1+3, enter 4.