Hot source HS 500
- for low vapor pressure liquids and solids
- enables precursor heating up to 500°C
- heated delivery line prevents precursor condensation
- very easy precursor change
- 5 ml glass crucible included
- water-cooled casing for safety
- for corrosive high-temperature processes a stainless steel reaction chamber is needed.
Precursor crucible for HS 500
- Container for precursor chemical
- Two material options, borosilicate glass and quartz
- HS-500-PC/B: Material borosilicate glass, up to 350 °C
- HS-500-PC/Q: Material Quartz, up to 500 °C
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