Tech specs

Hot source HS 500

Hot source HS 500

• for low vapor pressure liquids and solids
• enables precursor heating up to 500°C
• heated delivery line prevents precursor condensation
• very easy precursor change
• 5 ml glass crucible included
• water-cooled casing for safety
• for corrosive high-temperature processes a stainless steel reaction chamber is needed.

Precursor crucible for HS 500

• Container for precursor chemical
• Two material options, borosilicate glass and quartz
• HS-500-PC/B: Material borosilicate glass, up to 350 °C
• HS-500-PC/Q: Material Quartz, up to 500 °C