Tech specs

Hot source HS 500


Hot source HS 500

  • for low vapor pressure liquids and solids
  • enables precursor heating up to 500°C
  • heated delivery line prevents precursor condensation
  • very easy precursor change
  • 5 ml glass crucible included
  • water-cooled casing for safety
  • for corrosive high-temperature processes a stainless steel reaction chamber is needed.

Precursor crucible for HS 500

  • Container for precursor chemical
  • Two material options, borosilicate glass and quartz
  • HS-500-PC/B: Material borosilicate glass, up to 350 °C
  • HS-500-PC/Q: Material Quartz, up to 500 °C

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