TFS 600

Thin Film System TFS 600 for industrial OLED encapsulation

The Beneq TFS 600 is an application-specific ALD system designed for vacuum-line integrated organic light-emitting diode (OLED) encapsulation. It provides superior ALD thin-film quality while meeting the high throughput, robustness, and reliability requirements of an industrial in-line environment. In the TFS 600, these requirements are addressed by optimized reaction chamber design, a robust and modular build, proven control and operation components and integrated safety features.

Performance highlights

  • Superior thin-film coating quality, ideally suited for demanding OLED encapsulation applications
  • Short cycle time meeting high throughput in-line production requirements
  • Fully automated loading operations
  • Clean-room compatible
  • All components located within ventilated frame for occupational safety and health reasons
  • Ergonomic design for maximizing efficiency of substrate handling, precursor changing and vacuum chamber access and maintenance
  • Control system designed for easy line integration and compatible with GEM/SECS equipment-to-host communication

More information

Being an application-specific system, more information related to the TFS 600 can be found under the application page for nCLEAR barrier coatings for flexible and organic electronics.

Technical specifications

 Process temperature range 25 - 150 °C, nominal 90 °C
 Reaction chamber (L × W × H) 420 × 600 × 1165 (mm)
 Substrate size                  500 × 400 (mm)
max. amount    35 pcs (nominal)
 Liquid sources (ambient to 90 °C) up to 5 (may vary)
 Control system PLC control with PC user interface (GEM/SECS compatible)
 Main dimensions, ALD system (L × W × H) 2000 × 1200 × 2940 (mm) (may vary)
 Main dimensions, precursor rig (L × W) 2200 × 450 (mm) (may vary)

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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