Meet Beneq at CS International in Brussels

Beneq at Compound Semiconductor International

Tuesday, April 10, 2018 to Wednesday, April 11, 2018

ALD Throughput Revolution for More than Moore Applications 

Come and see our latest Atomic Layer Deposition equipment for the Semiconductor industry, which will move the wafer capacity of ALD equipment to the next level.

This time, we will have a special focus on emerging ALD markets, such as 

  • Power and RF devices (coating for GaN gate dielectrics, passivation and dielectric hardmasks, MIM and MIS capacitors)
  • MEMS and piezoelectric sensors and actuators, RF MEMS and image sensors (coatings for critical layers and seed layers for RF MEMS and image sensors, anti-stiction, stress control, AR, sealing and anti-corrosion)
  • LED and OLED (coatings for moisture barrier,s passivation, di-electric coatings, conformal conductors, optics, AR and powder coating).

If you are at the event, make sure to go and listen to Beneq's Mikko Söderlund's presentation High-Capacity Wafer-Scale Solutions for More than Moore Applications.

You can also find us from the exhibition hall during the event.

Should you want to book a meeting to hear the latest news about the ALD throughput revolution that is about to take place in the semiconductor industry, you can contact us with the form below.

We also have a special 10% discount code for you for attending the CS Conference: CS02. You can use it when registering to the event at

See you in Brussels!

By submitting this form you accept the Beneq privacy terms.

6 + 11 =
Solve this simple math problem and enter the result. E.g. for 1+3, enter 4.

Contact Lumineq

1 + 5 =
Solve this simple math problem and enter the result. E.g. for 1+3, enter 4.

Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

Proceed to download

4 + 10 =
Solve this simple math problem and enter the result. E.g. for 1+3, enter 4.