Beneq manufactures electroluminescent displays under the Lumineq brand and has been traditionally using sputtered ITO for the transparent top electrode. As part of production flow optimization, Beneq wanted to replace the sputtered ITO with ALD Transparent Conductive Oxide (TCO) material.
Beneq Lumineq displays, the leading manufacturer of electroluminescent displays.
Beneq used the P400 production systems to develop Aluminum doped Zinc Oxide (AZO) TCO coating by ALD and successfully implemented the process as an alternative for the sputtered ITO.
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