The challenge
Near-infrared (NIR) filters are typically several micrometers thick optical stacks of low and high index materials. It’s impossibe to coat such high quality filters on curved surfaces, such as glass cylinders, using conventional PVD methods.
The customer
A CCD sensor -based industrial vision systems supplier.
Beneq solution
A customized batch ALD process using proprietary optical Al2O3 and TiO2 materials. Beneq’s robust production-tested equipment enabled a stable and reliable process for the challenging several micrometers thick film stack.