ALD TechDay Forum 2022



Beneq hosted a private afternoon forum for customers at Semicon Europa in Munich on Tuesday, November 15th. The ALD TechDay Forum was an afternoon seminar on the theme of ALD’s rapid adoption in More-than-Moore device production. The audience was comprised of Semiconductor IDM’s, foundries, and research and technology organizations. The discussion focused on device markets that included power, RF, CMOS image sensor, optoelectronics and photonics devices, MEMS sensors and actuators, advanced packaging, and µOLED fabs and IDMs.

Panel Discussion with Beneq, Yole Group, and CEA-Leti


  • “Atomic layer deposition (ALD) equipment for More-than-Moore devices,” a talk by Taguhi Yeghoyan, Ph.D., Yole Group 
  • “Critical ALD solutions addressing More-than-Moore device challenges,” a talk by Patrick Rabinzohn, Ph.D., Beneq Oy
  • “Gate dielectrics challenges for GaN-MOS channel HEMT power transistors – ALD/PEALD opportunities,” a talk by Messaoud Bedjaoui, Ph.D., CEA-Leti
Patrick Rabinzohn, Beneq Presentation

There were three seminar presentations followed by a panel discusssion and networking dinner. We are thankful for our excellent guest speakers from Yole Group and CEA-Leti. There were many lively discussions in the room and we had an active audience.

The audience voted at the end of the forum on the Best Speaker award and a small prize was presented to Messaoud Bedjaoui from CEA-Leti.

We are thankful for all of our partners who helped make this event a success! After great feedback from participants, we are encouraged to host the event again next year and hope to see even more customers and partners in 2023!

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Partners we want to thank: CEA-Leti, Yole Group, Angel Business Communications, and Novotel Muenchen Messe.

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