Sustaining optical performance requires a high degree of uniformity, typically around 1% depending on the optical specification. Unlike PVD, ALD coatings are ideal both at the micro level for nano structures and the macro level for any free-form optics. ALD forms monolayers through saturated chemical reactions, so you can tailor properties of optical materials at atomic-scale accuracy. This offers excellent repeatability and thickness control on large batches.
Introducing Beneq P400A: designed for the perfect balance between uniformity and throughput.
While generally lower in deposition rate compared to PVD, ALD compensates by using larger batches. The Beneq P400A is optimized to conformally deposit thick films at a higher growth rate in a larger batch.
We provide you with expertise and software to design every individual ALD layer for the best performance subject to your design constraints.
Perfectly conformal ALD film stack on silicon test structure
Curved lenses
ALD is ideal for highly curved lenses
Batch coating of large diameter optical dome
Example of a test-jig spherical dome Film non-uniformity over all measurement locations over all coated samples in a batch run: 1.2 %
A simpler alternative without compromise in throughput.
Unlike PVD, you do not need to rotate the substrates with ALD. This means a simpler way to enable larger batch production. The Beneq P400A offers a unique combination of high uniformity, large batch size and high deposition rates. The Beneq ALD process guarantees conformality on complex 3D shapes. It offers the ideal coating soutions for freeform optics, optical domes, optical gratings and more.
Beneq C2R™ is the spatial ALD member of our Cluster-compatible equipment family. Beneq C2R takes the Plasma Enhanced ALD (PEALD) process to a fully new level – for the first time, PEALD can be used in high volume manufacturing.
In this webinar Sami Sneck, the Business Executive of Beneq showcases examples of conformal and uniform optical coatings on complex 3D objects and more
The challenge when coating 3D optics is to deposit the coating with high uniformity over an arbitrary topology in a simple manner. The common techniques used for optical coatings, including magnetron sputtering, evaporation, electron beam evaporation (EBE) and ion beam sputtering (IBS), all so called line-of-sight methods.
We did a little research and looked at the list of all customer projects from our Coating Services unit and checked what industrial ALD applications our customers have run on Beneq equipment. These were the 3 most popular industrial ALD applications.
Optical lenses and prisms are used to redirect the light waves, they’re also used to allow a specific light wave to pass through, or to reflect specific wavelengths.
Our complete thin film service concept, Thin as a Service, which we launched last year, has been received well. The customers seem to appreciate the possibility to get a quick proof of concept of new ALD applications with ALD-123 as well as the shorter time to production enabled by our Coating Services.
Earlier we shared examples of industrial use of ALD in moisture barriers. Now we continue with another typical area of ALD applications: Optical coatings.
Earlier today we shared news about the next solution in our spatial ALD equipment family: A new rotary spatial reactor we are developing based on technology we have licensed from Lotus Applied Technology.
One of the main ALD events of the year, the 16th International Conference on Atomic Layer Deposition, ALD2016 Ireland, is approaching. Beneq is a platinum sponsor at the event and we will have lots of activity at the site and around it.
The world is getting thinner. The never-ending quest to miniaturize and digitalize everything while saving our limited resources requires innovative technologies that allow creating ultra-thin reflecting layers, strengthening coatings, nanolaminates and protective barriers in spaces where just a few years ago nobody imagined it would be possible to operate.
