Beneq at the ALD/ALE 2021 Conference
We made some new product and feature announcements last week at the ALD/ALE 2021 conference. Have a look at the recordings below.
Hear the latest developments across Beneq’s catalog of products, including the Transform, TFS 200, R2, Genesis ALD and many more!
You can also watch 12 minute highlights here.
ALD for Process Scale-Up
Lassi Leppilahti discusses Atomic Layer Deposition Process Scale-Up to Very Large Batch Size on his presentation. Watch here.
Optimization of AlN Film Purity Using Atomic Layer Annealing
Markus Bosund’s presentation on Optimization of AlN Film Purity Using Atomic Layer Annealing is now available for everyone. Watch here.