ALD enables safer and higher performance batteries

Atomic layer deposition (ALD) offers conformal coatings and precise thickness control, at a nanoscale, of critical interfaces within battery structures. 10+ years of extensive research have demonstrated benefits of ALD on Lithium-ion Battery (LIB), Solid State Battery (SSB) and Lithium-Sulfur (Li-S) battery applications.

  • Protective coatings on cathode materials
  • Artificial solid electrolyte interphase (SEI) on anode materials
  • Li-metal anode passivation and dendrite growth prevention
  • Solid state electrolyte (SSE) by ALD
  • Protective coating on separator films

The only commercially available roll-to-roll ALD equipment, for mass battery production. Roll-to-roll (R2R) ALD offers the only viable solution on next-generation batteries that require web coating for essentially non-porous surfaces. For coatings on cathode and anode materials R2R ALD also offers a compelling, simpler alternative to particle ALD solutions. Designing around your needs we offer standard or customized ALD systems for lab R&D and volume production.


Examples of ALD coatings on Li batteries, anode and cathode materials.

Image 1: Cycling performance of R2R ALD TiO2 coated NCM523 cathodes, charged and discharged at 1 C at 55°C.
T2-120: 0.12m/min 120°C. T40-120: 2.4m/min 120°C.

Image 2: Hybrid organic/inorganic artificial solid electrolyte interphase (SEI) on Li metal anode protecting Li metal anode for over 300 cycles at current density 1 mA/cm2 and over 110 cycles at current density 2 mA/cm2.

Image 3: Electrochemical rate performance comparison of the bare-Li and Li with ALD ZrO2 coin cells.

Image 4: ALD Li3BO3-Li2CO3 solid state electrolyte (SSE) with excellent stability against Li metal and high ionic conductivity.

Image 5: Thermogravimetric analysis curve for R2R ALD Al2O3 coated separator film showing improved high-temperature performance.


Supercharge Li-ion battery lifetime and improve product safety. Research demonstrates significantly longer Li-ion battery lifetime by stabilizing electrode and electrolyte interface (SEI), using ALD. Battery safety is enhanced by improving the thermal stability of the separator film in LIBs. Beneq’s roll-to-roll ALD enables manufacturing of improved solid state battery designs.

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