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Beneq is the global leader in industrial and research atomic layer deposition (ALD) equipment since 1984.

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Atomic layer deposition, engineered for production.

We turn proven ALD expertise into production solutions for semiconductors, optics, and emerging technologies.

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Atomic Layer Deposition

Learn more about ALD technology and Plasma-Enhanced ALD (PE-ALD), including ALD applications, thin film deposition, and ALD reactors.

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