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Beneq is the global leader in industrial and research atomic layer deposition (ALD) equipment since 1984.

Atomic layer deposition, engineered for production.

We turn proven ALD expertise into production solutions for semiconductors, optics, and emerging technologies.

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Explore ALD systems for research and production, built to handle diverse substrates, performance targets, and throughput demands.

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Atomic Layer Deposition

Learn more about ALD technology and Plasma-Enhanced ALD (PE-ALD), including ALD applications, thin film deposition, and ALD reactors.

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