Ozone gas options

Beneq ozone line and generator options for TFS 200 allow ozone gas to be used in thermal ALD depositions.

The ozone gas option cabinet includes:

  • An ozone generator
  • Flow adjustment devices
  • Ozone reservoir and destructor

Ozone line O3

The ozone line O3 option includes all parts for using ozone gas. It is fully integrated into the TFS 200 electrical and software systems.

Pictured here without its cover
(cover included in the package)


  • Ozone generator 803N (BMT Messtechnik GmbH)
    with 8 g/h ozone production
  • Includes pressure regulator, rotameter, pneumatic pulsing valve,
    stainless steel tubing with VCR® (Swagelok) fittings,
    outlet for flow adjustment and ozone destructor
  • Integration with TFS 200 electrical cabinet for power feed
  • Ozone cabinet with ventilation connection

Please note that Beneq requires use of gas detection and alarm systems in combination with hazardous gases (detectors can be separately purchased from Beneq).

Ozone analyzer

The Ozone analyzer is used for measuring ozone concentration. The product is manufactured by BMT Messtechnik GmbH.

  • Stainless steel and PFA tubing with VCR® - and Swagelok fittings
  • Integration into TFS 200 electrical cabinet and control system


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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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