The challenge
Common scintillator materials include Cesium Iodide (CsI) and Sodium Iodide (NaI), which are sensitive to moisture. Competitive product lifetime requires a thin film encapsulation coating.
The customer
A leading scintillator plate manufacturer.
Beneq solution
A robust batch ALD process for up to 440 x 440 mm plates. A conformal, dense and pinhole-free low temperature Al2O3 and TiO2 barrier coating enabled dramatic increase of product lifetime and reliability.