Customer Cases

ALD encapsulation of scintillator plates

The challenge

Common scintillator materials include Cesium Iodide (CsI) and Sodium Iodide (NaI), which are sensitive to moisture. Competitive product lifetime requires a thin film encapsulation coating.

The customer

A leading scintillator plate manufacturer.

Beneq solution

A robust batch ALD process for up to 440 x 440 mm plates. A conformal, dense and pinhole-free low temperature Al2O3 and TiO2 barrier coating enabled dramatic increase of product lifetime and reliability.

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