Customer Cases

Encapsulation of OLED microdisplays

The challenge

OLED microdisplays require ultra-high quality thin-film encapsulation to enable long device lifetime. A typical encapsulation requirement is a water vapor transmission rate (WVTR) smaller than 1*10-6 g/(m2 day), which is challenging to achieve with conventional thin-film deposition methods due to low process temperature requirements.

The customer

Leading Asian OLED microdisplay manufacturer.

Beneq solution

A 50 nm thick Al2O3/TiO2 nanolaminate coating deposited at a low temperature of 90 °C using a fully automated TFS 200 system integrated in the customer’s manufacturing cluster.

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