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Tech specs
Reaction chamber
Standard reaction chambers
Reaction chambers RC-200/18 AL and RC-200/18 SS
- For single wafers and flat samples
- Max. substrate dimensions: diam. 200 mm, height 18 mm
- Optimised for high deposition rate and excellent uniformity
- Cross-flow precursor delivery
- Material options aluminum (RC-200/18 AL) , stainless steel (RC-200/18 SS) or titanium
- RC-200/18 AL recommended max temperature for continuous use 350 °C
- RC-200/18 SS maximum temperature 500 °C
Reaction chambers RC-200/95 AL and RC-200/95 SS
RC 200/95 AL
- For wafer batch or 3D samples
- Diameter 200 mm, height 95 mm
- Optimised for high deposition rate
- Cross-flow precursor delivery
- Maximum wafer diameter 200 mm
- Customized substrate rack available as option
- Wafer cassette for 25 wafers available
- Material options aluminum (RC-200/95 AL) or stainless steel (RC-200/95 SS)
- RC-200/95 AL recommended max temperature for continuous use 350 °C
- RC-200/95 SS maximum temperature 500 °C
Wafer casettes for batch reaction chambers
Wafer cassette
WC-100/25, WC-150/25 and WC-200/25
- For 25 wafer batches (maximum)
- Used with reaction chamber RC-200/95
- Material: aluminum
- Max recommended temperature 350 °C
- WC-100/25 for 100 mm wafers (diameter)
- WC-150/25 for 150 mm wafers
- WC-200/25 for 200 mm wafers
Load lock reaction chambers
LL-RC-200/18 AL and LL-RC-200/18 SS
- for single round wafers and flat samples with 200 mm wafer adapter
- maximum substrate diameter 200 mm, height 18 mm
- optimised for high deposition rate and excellent uniformity
- cross-flow precursor delivery
- material aluminum (RC-200/95 AL) or stainless steel (RC-200/95 SS)
- RC-200/95 AL recommended max temperature for continuous use 350 °C
- RC-200/95 SS maximum temperature 500 °C
LL-RC-200×200
- for regtangular single 200 × 200 mm flat glass substrates
- substrate thickness 1…6 mm (with adapter)
- excellent for particle sensitive depositions
- available for face-down processing also!
- optimised for high deposition rate and excellent uniformity
- cross-flow precursor delivery
- material aluminum and stainless steel
- requires z-axis movement from loader
- maximum recommended temperature 200 °C
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