Spares & upgrades

Reaction chambers

Man with mask

Cross-flow precursor delivery for excellent thin film uniformity

Beneq reaction chambers support the excellence and modularity of the TFS 200 research platform.

There are two main reaction chamber groups:

  1. Reaction chambers loading through a manual lid
  2. Reaction chambers loading through gate valve (used with a load lock)

Both chamber option groups:

  • Support cross-flow precursor delivery, which guarantees true ALD growth, excellent thin film uniformity and precise precursor dosing
  • Are interchangeable
  • Are easy to assemble
  • Are quick to install
  • Have optimized flow channels for minimal internal volume, high rate deposition and fast purging

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