Spares & upgrades

Reaction chambers

Man with mask

Cross-flow precursor delivery for excellent thin film uniformity

Beneq reaction chambers support the excellence and modularity of the TFS 200 research platform.

There are two main reaction chamber groups:

  1. Reaction chambers loading through a manual lid
  2. Reaction chambers loading through gate valve (used with a load lock)

Both chamber option groups:

  • Support cross-flow precursor delivery, which guarantees true ALD growth, excellent thin film uniformity and precise precursor dosing
  • Are interchangeable
  • Are easy to assemble
  • Are quick to install
  • Have optimized flow channels for minimal internal volume, high rate deposition and fast purging

Contact us

Do you have an inquiry?

Contact our team of experts to get more information, request a sample, or ask for a quote.

Contact us
Contact us