Tech specs

Quartz Crystal Microbalance (QCM)

Man with mask

Quartz Crystal Microbalance QCM-200

The quartz crystal microbalance upgrade includes:

  • QCM compatible vacuum chamber top flange, vacuum chamber top flange with 2 pieces of feedthrough ports
  • QCM compatible reaction chamber top lid for integrating the Colnatec QCM-head to the top flow channel of the reaction chamber. Material aluminium, maximum temperature rating up to 350 °C. Lid is compatible with an existing chamber.
  • Installation and commissioning at site when purchased as an upgrade to an existing TFS 200

QCM measurement components:

  • Colnatec Phoenix Sensor Head
  • Feedthrough with KF40
  • Colnatec EonLT Monitor, Temperature measuring film thickness monitor. The combination of frequency and temperature measurement allows unprecedented accuracy in real-time rate and film thickness monitoring.
  • Software and cable
  • 3 pcs of crystals for 3 different temperature ranges
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