Spares & upgrades

Quartz Crystal Microbalance (QCM)

Man with mask

For in-situ thin film growth monitoring

Quartz Chrystal Microbalance (QCM) is a cost efficient and accurate film growth measurement tool for ALD depositions. It is an economical way to get film growth data during the deposition when compared to ellipsometer measurements.

Reaction Chamber top lid with feedthroughs for integrated QCM sensor head

QCM also allows the true “in-situ” measurement compared to many ellipsometer integrations where deposition needs to be halted during the measurement. 

AIO3 film thickness growth vs time, a range of 1 minute
AIO3 film thickness growth rate vs time, a range of 1 minute

The Beneq QCM option can be easily installed on any TFS 200 with a thermal reaction chamber, and includes all needed parts and services for start-up on-site.

The QCM option is compatible with manual and load-lock reaction chambers with slight modifications.

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