For in-situ thin film growth monitoring
Quartz Chrystal Microbalance (QCM) is a cost efficient and accurate film growth measurement tool for ALD depositions. It is an economical way to get film growth data during the deposition when compared to ellipsometer measurements.
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QCM also allows the true “in-situ” measurement compared to many ellipsometer integrations where deposition needs to be halted during the measurement.
![](http://beneq.com/wp-content/uploads/2020/02/546x298xgraph1-jpg-pagespeed-ic-zfnh7hdq1q-720x393.jpg)
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The Beneq QCM option can be easily installed on any TFS 200 with a thermal reaction chamber, and includes all needed parts and services for start-up on-site.
The QCM option is compatible with manual and load-lock reaction chambers with slight modifications.