For in-situ thin film growth monitoring
Quartz Chrystal Microbalance (QCM) is a cost efficient and accurate film growth measurement tool for ALD depositions. It is an economical way to get film growth data during the deposition when compared to ellipsometer measurements.
QCM also allows the true “in-situ” measurement compared to many ellipsometer integrations where deposition needs to be halted during the measurement.
The Beneq QCM option can be easily installed on any TFS 200 with a thermal reaction chamber, and includes all needed parts and services for start-up on-site.
The QCM option is compatible with manual and load-lock reaction chambers with slight modifications.