TFS 1200

Thin Film System TFS 1200 for in-line and batch production of buffer layer on CIGS cells

The Beneq TFS 1200 is an application-specific system designed for industrial in-line production of buffer layer coatings on copper-indium-gallium-diselenide (CIGS) thin film solar cells. The maximum substrate size is 1200 × 1200 (mm), a recognized world-record in substrate size in ALD.

More information

Being an application-specific system, more information related to the TFS 1200 can be found under the application page for Cadmium-free buffer layer for CIGS solar cells.

Coating specifications

 Materials  Zn(O,S)
 (Zn,Mg)O      (optional)
 
 Thickness  20 - 50 nm
 Process temperature  120 - 130 °C
 Throughput and productivity
 (for Beneq TFS 1200 in-line coating system)
 panel amount:     5 panels/h (for 50 nm Zn(O,S)
 coating)
 max. panel size:  1200 × 1200 (mm)
 annual capacity:  ≈ 6.5 MWp/a
  Throughput and productivity
  Beneq TFS 1200 B off-line batch module
  (8 substrates each)
 panel amount:     60 panels/h (for 50 nm Zn(O,S) 
 coating)
 max. panel size:  1200 x 1600 (mm)
 annual capacity:  ≈ 140 MWp/a

Contact Beneq

CAPTCHA
This question is for testing whether or not you are a human visitor and to prevent automated spam submissions.
7 + 4 =
Solve this simple math problem and enter the result. E.g. for 1+3, enter 4.

Contact Beneq

CAPTCHA
This question is for testing whether or not you are a human visitor and to prevent automated spam submissions.
7 + 9 =
Solve this simple math problem and enter the result. E.g. for 1+3, enter 4.