Spares & upgrades

Hot source HS 500

Flexibility though easy use of multiple chemistries

The hot source HS 500 options support the versatility and modularity of the TFS 200 research platform in the following ways:

  • Excellent for ALD precursor chemistry research
  • Enables use of precursors with very low vapor pressure (e.g. HfCl4, ZrCl4, beta-diketonates, amides, cyclopentadienyl, etc.)
  • Small precursor quantities
  • Easy and fast precursor filling and fast heating time
  • Hot source HS 500 enables the use of precursors and processes that require higher temperatures than the HS 300 can accommodate
  • Fast precursor loading and unloading

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