Skip to content

Beneq

Products
Services
Markets & Applications
Support
About
中文
Contact us
Lumineq.com

TFS 500

Overview
Tech Specs
Ask Us

Research Equipment

TFS500

Thin film system for ALD research and batch production

Do you have an inquiry?

> Research Equipment > TFS 500 > Ask Us

Newsletter

Get case studies, event info and news updates.

Products

Batch Production Equipment
Research Equipment
Wafer Fab Equipment
Spatial ALD Equipment

Services

Coating services
R&D services
Spare Parts and Upgrades

Markets & Applications

Advanced Packaging
MEMS
Mints, Jewelry
Optical Coatings
PCB
Optoelectronics, LED, and Image Sensors
Radio Frequency (RF) Devices
Semicon Equipment Part Coating
Batteries
University and Research

Support

Contact us

About

Beneq Group
Careers
Newsroom
Overview

LinkedIn
Youtube
Twitter
Facebook

© Beneq