Batch Production Equipment

Beneq P400A & P800

Thin film systems for industrial production

Manual

Substrate Loading

Production

Usage

Thermal ALD

Process type

Stand-alone

Integration

Process type
Thermal ALD
Usage
Production
Substrate type
Wafers
Glass and metal sheets
3D parts
P400A substrate size: 370 x 470 mm
P800 substrate size: 730 x 1200 mm
Substrate loading
Manual
Main dimensions
P400: 2400 x 930 x 2420 mm
P800: 3200 x 1340 x 2460 mm
Integration
Stand-alone

Comparison

P-Series

Product P400A P800
Process temperature range 25 – 550 °C 25 – 550 °C
Vacuum chamber dimensions ø400 mm ø800 mm
Reaction chamber types and dimensions Application specific, substrate space, e.g.: – 240 × 240 × 720 mm, with 23 shelf cassette – 370 × 470 x 25 mm, with 2 shelf cassette Application specific, substrate space, e.g.,: – 550 × 310 × 700 mm – 380 × 380 x 900 mm, – 730 x 1200 x 10 mm
Precursor sources 5 parallel feeding lines for gas, liquid and solid precursors. Up to 10 precursors possible. 5 parallel feeding lines for gas, liquid and solid precursors. Up to 10 precursors possible.
Control system PLC control with PC user interface PLC control with PC user interface
Main dimensions (L × W × H) 2400 × 930 × 2420 (mm) 3200 × 1340 × 2460 (mm)
Product P400A
Process temperature range 25 – 550 °C
Vacuum chamber dimensions ø400 mm
Reaction chamber types and dimensions Application specific, substrate space, e.g.: – 240 × 240 × 720 mm, with 23 shelf cassette – 370 × 470 x 25 mm, with 2 shelf cassette
Precursor sources 5 parallel feeding lines for gas, liquid and solid precursors. Up to 10 precursors possible.
Control system PLC control with PC user interface
Main dimensions (L × W × H) 2400 × 930 × 2420 (mm)
Product P800
Process temperature range 25 – 550 °C
Vacuum chamber dimensions ø800 mm
Reaction chamber types and dimensions Application specific, substrate space, e.g.,: – 550 × 310 × 700 mm – 380 × 380 x 900 mm, – 730 x 1200 x 10 mm
Precursor sources 5 parallel feeding lines for gas, liquid and solid precursors. Up to 10 precursors possible.
Control system PLC control with PC user interface
Main dimensions (L × W × H) 3200 × 1340 × 2460 (mm)

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