BeneqCare® for Semiconductor Manufacturing

Service and support from established semiconductor professionals who know your manufacturing tool the best. Recommended options for semiconductor manufacturing tools ensure reliable film quality and optimal tool availability. By reducing unplanned maintenance and delivering fast support starting from 6 hours upon request, BeneqCare® will help keep productivity on track. Add or remove modules to build the optimal BeneqCare® plan for your semiconductor manufacturing needs.

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Beneq engineer servicing a tool

Technical support services

Standard technical support is free for all Beneq customers. BeneqCare® allows you to upgrade support to avoid unnecessary downtime and safeguard the productivity of your tool.

Select one of the two response time options.
Select one or more additional service modules for your BeneqCare®.

Onsite services

Onsite maintenance options to ensure reliable throughput. BeneqCare® options include preventative maintenance, corrective maintenance, onsite Beneq engineers, and even user and maintenance training for your personnel.

Select one or more service levels for your BeneqCare®.

Spare part services

Spare part services offer you flexible and cost-effective approaches for optimizing availability. The basic spare part plan that is free for all Beneq customers is customer-managed spares, but BeneqCare® allows upgrade options to simplify and expedite the process when a spare part is needed. Additionally, all BeneqCare® customers enjoy benefits on original Beneq spare parts with a 5% discount on all parts orders.

Select one or more service levels for your BeneqCare®.

Request more information about BeneqCare®

If you can’t find what you’re looking for or you have other questions, you can also contact us to discuss your specific needs for BeneqCare® in more detail.

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