Tech specs

Thermal gas line

Thermal Gas Line

TGL-1 Gas Line

For N2, O2, H2 or Ar.

Includes:

  • Pneumatic pulsing valve, stainless steel tubing with VCR connectors, and orifice for flow adjustment
  • Hardware and software interlocks for non-compatible gas combinations

Please note that Beneq requires the use of gas detection and alarm systems in combination with hazardous gases (detectors can be separately purchased from Beneq).

TGL-2 Gas Line for flammable/toxic gases

For NH2, H2S, SixHy or WF6.

Includes:

  • Pneumatic pulsing valve, stainless steel tubing with VCR connectors, and orifice for flow adjustment
  • Hardware/software interlocks for non-compatible gas combinations
  • Double interlock valves on the gas supply
  • Integrated purge line with automated purge control

Please note that Beneq requires the use of gas detection and alarm systems in combination with hazardous gases (detectors can be separately purchased from Beneq)

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