Spares & upgrades

Thermal gas line

Thermal Gas Line

For controlled gaseous precursors pulsing

Thermal gas lines enable gaseous precursors such as NH3, H2S, and SiH4 being pulsed into the ALD reaction chamber in a controlled way.

The thermal gas line options support the excellence and modularity of the TFS 200 research platform:

  • Different gas line options are available for any ALD compatible gaseous precursor
  • Gas line options include the necessary additional hardware and software
  • Depending on the precursor type, there are two levels of safety for thermal gas line options available (non-hazardous or flammable/toxic)

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