Quartz Crystal Microbalance QCM-200
The quartz crystal microbalance upgrade includes:
- QCM compatible vacuum chamber top flange, vacuum chamber top flange with 2 pieces of feedthrough ports
- QCM compatible reaction chamber top lid for integrating the Colnatec QCM-head to the top flow channel of the reaction chamber. Material aluminium, maximum temperature rating up to 350 °C. Lid is compatible with an existing chamber.
- Installation and commissioning at site when purchased as an upgrade to an existing TFS 200
QCM measurement components:
- Colnatec Phoenix Sensor Head
- Feedthrough with KF40
- Colnatec EonLT Monitor, Temperature measuring film thickness monitor. The combination of frequency and temperature measurement allows unprecedented accuracy in real-time rate and film thickness monitoring.
- Software and cable
- 3 pcs of crystals for 3 different temperature ranges