Tech specs

Quadruple Mass Spectrometer (QMS)


Quadruple Mass Spectrometer QMS-200

– MKS Vision 2000-C QMS unit
– continuous in-situ monitoring of ALD process
– minimum detectable concentration: <200 ppb for non-interfering species
– software for data acquisition and interpretation
– can be used for ALD system leak detection
– integration to TFS 200 pump line
– pump line heater from ALD system vacuum chamber outlet to the QMS unit

Installation and commissioning at site when purchased as an upgrade to an existing TFS 200.

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