Quadruple Mass Spectrometer QMS-200
– MKS Vision 2000-C QMS unit
– continuous in-situ monitoring of ALD process
– minimum detectable concentration: <200 ppb for non-interfering species
– software for data acquisition and interpretation
– can be used for ALD system leak detection
– integration to TFS 200 pump line
– pump line heater from ALD system vacuum chamber outlet to the QMS unit
Installation and commissioning at site when purchased as an upgrade to an existing TFS 200.
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