Tech specs

Liquid source

Liquid Sources

Liquid source line with boosting functionality LS-BL

For low vapour pressure liquid precursors (BTBAS, 3DMAS, TEGA, etc.)

Includes:

  • two pneumatic pulsing valves: one for purge gas, the other for chemical supply
  • high precision needle valve for pulse adjustment
  • orbital welded stainless steel tubing with VCR® (Swagelok) fittings
  • aluminum liquid source container holder cooling cup for controlling the source temperature between +5 °C and room temperature (requires cooling water assembly, chiller or facility cooling lines)

Please note that this option does not include a precursor container.

Liquid source precursor containers LS-BL-PC/200 and LS-BL-PC/200 DOT

Additional liquid source containers.

Liquid source container with boosting line
  • for water (H2O), trimethyl aluminum (TMA), diethyl zinc (DEZ), titanium tetrachloride (TiCl4) etc.
  • volume 200 ml, maximum filling volume 150 ml*
  • equipped with two separate lines with manual valves
  • material: stainless steel
  • LS-LS-BL-PC/200 : for H2O, TMA, DEZ, TiCl4 etc.
  • LS-BL-PC/200 DOT : for H2O, TMA, DEZ, TiCl4 etc., DOT* certified

*) Department of Transportation (USA)

Liquid source line with single output line LS-SL

For H2O, TMA, DEZ, TiCl4 etc.

Liquid source line with single output line LS-SL

Includes:

  • pneumatic pulsing valve
  • orifice for pulse adjustment (high precision needle valve available as an option) orbital welded stainless steel tubing with VCR ® (Swagelok) fittings
  • aluminum liquid source container holder cooling cup for controlling the source temperature between +5 °C and room temperature (requires cooling water assembly, chiller or facility cooling lines)

Please note that this option does not include a precursor container.

Liquid precursor source, single line design LS-SL

For high vapour pressure precursors (H2O, TMA, DEZ etc.)
Includes:

  • two pneumatic pulsing valves,
  • high precision orifice for dose adjustment,
  • stainless steel tubing with VCR connectors
  • cooling cup for liquid source container

Liquid source precursor container  LS-SL-PC/200, LS-SL-PC/200/H2O and LS-PC/200/DOT

  • additional containers
  • volume 200 ml, maximum filling volume 150 ml
  • three different container types for different chemicals
  • LS-PC/200/H2O for H2O and other non-toxic and corrosive chemicals
  • LS-PC/200 for H2O, TMA, DEZ, TiCl4 etc
  • LS-PC/200/DOT for H2O, TMA, DEZ, TiCl4 etc,  DOT* certified
  • using separate containers for different precursors prevents cross contamination
  • containers are equipped with output line with manual valve
  • convenient filling port for adding chemicals
  • material stainless steel

*) Department of Transportation (USA)

Liquid source pressure transducer  LS-PT

For monitoring liquid source pulsing.

Liquid source pressure transducer LS-PT (arrow)
  • useful for preventing running out of precursors during runs
  • specifically useful for process development
  • compatible with both LS-SL and LS-BL source line configurations
  • Pressure range 0 – 100 Torr.

Needle valve for dose adjustment NV-HP

Replaces the orifice in the standard single-line liquid source.

Needle valve (arrow)
  • allows easy, high precision dose adjustment during process tuning
  • for new chemistry depositions
  • adjustable flow range

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