Tech specs

Hot source HS 300

Man with mask

Hot Source HS300

  • for e.g. HfCl4, ZrCl4, beta-diketanotes
  • high evaporation area and load-and-release mode allow using the lowest possible precursor temperature
  • minimal precursor decomposition
  • fast heating
  • optional container particle filtration (patented) system available
  • precursor container must be purchased separately
  • Hot source for up to 300 °C line temperature for one precursor source container.

Dual Hot Source DHS 300

  • dual sources for two separate HS 300 sources inside a combined frame
  • for e.g. HfCl4, ZrCl4, beta-diketanotes
  • high evaporation area and load-and-release mode allow using the lowest possible precursor temperature
  • minimal precursor decomposition
  • maximum temperature difference is 100 °C between the two sources
  • optional container particle filtration (patented) system available
  • precursor container must be purchased separately
  • Dual hot source for up to 300 °C for two precursor source containers.

Hot Source Precursor Containers HS 300-PC/OP and HS 300-PC/DOT

  • used with hot source HS 300
  • container volume 580 ml (max. filling rate 400 ml). Use of separate containers for different precursors prevents cross contamination
  • two types of containers available: with removable lid to be filled locally, and all-welded design for safe transportation
  • compatible with HS 300 and DHS 300
  • HS 300-PC/OP: material stainless steel with container and all line parts. Container flange with different CF-gasket materials. Intended to be filled with precursor locally in glove box, removable lid design with metal sealing.
  • HS 300-PC/DOT: material stainless steel. All-welded design with VCR-connections. DOT* certified

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