high evaporation area and load-and-release mode allow using the lowest possible precursor temperature
minimal precursor decomposition
fast heating
optional container particle filtration (patented) system available
precursor container must be purchased separately
Hot source for up to 300 °C line temperature for one precursor source container.
Dual Hot Source DHS 300
dual sources for two separate HS 300 sources inside a combined frame
for e.g. HfCl4, ZrCl4, beta-diketanotes
high evaporation area and load-and-release mode allow using the lowest possible precursor temperature
minimal precursor decomposition
maximum temperature difference is 100 °C between the two sources
optional container particle filtration (patented) system available
precursor container must be purchased separately
Dual hot source for up to 300 °C for two precursor source containers.
Hot Source Precursor Containers HS 300-PC/OP and HS 300-PC/DOT
used with hot source HS 300
container volume 580 ml (max. filling rate 400 ml). Use of separate containers for different precursors prevents cross contamination
two types of containers available: with removable lid to be filled locally, and all-welded design for safe transportation
compatible with HS 300 and DHS 300
HS 300-PC/OP: material stainless steel with container and all line parts. Container flange with different CF-gasket materials. Intended to be filled with precursor locally in glove box, removable lid design with metal sealing.
HS 300-PC/DOT: material stainless steel. All-welded design with VCR-connections. DOT* certified
