Tech Specs


Ellipsometer Load-Lock enables a Film Sense FS1 or Woollam iSE ellipsometer cost-efficient integration to your existing TFS 200 ALD tool. This makes it possible to monitor film growth without breaking the vacuum conditions during measurement.

This upgrade offers a completely new dimension for studying  the ALD film growth.

Contact us

Do you have an inquiry?

Contact our team of experts to get more information, request a sample, or ask for a quote.

Contact us