11 February 2020 Beneq

Professor Jan Macák of the University of Pardubice explores ALD for coating nanostructures. Using Beneq's TFS 200 tool with a stop-flow option he and his team are able to significantly increase light absorption using TiO2 nanotubes, creating more efficient solar cells.
Learn more here.

11 February 2020 Beneq

Thanks to its luminescence properties there has been a lot of research on red color emission using europium-doped phosphors Y2O3−xSx:Eu (YOS:Eu). Our team at Beneq discovered that, by using ALD, it is possible to emit new colors such as blue/violet by controlling the europium oxidation state.

Learn more here.

11 February 2020 Beneq

It's here. Beneq R2 retails for EUR 130 000/ USD 145 000, making it our most affordable tool yet. We’re raising the bar for what universities have come to expect from entry-level ALD research equipment with new features and add-on options such as plasma, while lowering the total investment.

Learn more here.

9 February 2020 Beneq

Moisture barriers are a key application of ALD in 2019. Its pinhole-free, conformal properties offer the ultimate protection against humidity - for printed circuit boards (PCBs) and other electronic devices.

Learn more from our white paper on ALD Moisture Barriers here.

25 September 2019 Beneq

Grenoble, France – Beneq, a leading provider of ALD R&D and production technology, today announced the BENEQ TransformTM. A versatile ALD platform it is particularly useful for More-than-Moore device fabrication, OLED and virtual reality applications.

22 July 2019 Beneq

Bellevue, Washington, USA – Beneq today unveiled R2, a compact modular platform that makes it dramatically easier for universities, research institutes and enterprises to start advanced ALD research. Completely redesigned from the ground up with ergonomics in mind, the basic R2 model comes fully equipped for thermal ALD. With flexible add-on options customers can easily expand to other advanced processes such as plasma, batch processing, powder ALD, and reduced flow.

18 June 2019 Beneq

Scintillates are one of the oldest types of radiation detector because initially measurements could be made with photographic film. Images could be collected, or intensity measurements made. Measurements could even be made with the human eye observing the brightness of frequency of flashes in the scintillator. Nowadays, the light output is converted into data that are processed using compact photodiodes. Scintillators come in different types, and in this edition of the blog, we look at Beneq’s ALD encapsulation solutions.

27 May 2019 Equipment

In this technical blog we describe how ALD can be utilized for coating high curvature optics using spherical domes as an example. The challenge when coating 3D optics is to deposit the coating with high uniformity over an arbitrary topology in a simple manner. ALD has proven its suitability for high precision pinhole free films, where the challenge is not only to achieve uniformity over a large scale, but to coat conformally over high aspect ratio structures.

7 May 2019 Beneq

Beneq introduces a new investment plan to support growth in new industrial ALD solutions and the transparent display business. The new owners of Beneq have approved an investment program that allows Beneq to grow faster in its strategic focus areas, such as ALD solutions for the emerging semiconductor applications and transparent vehicle displays. Together with the new owners’ earlier investments in 2018 to improve Beneq’s equity ratio and working capital, the announced development programs result in a total investment of over 20 million euros.

7 May 2019 Beneq

BeneqOy panostaa kasvuun. Beneq esitteli tänään uuden investointiohjelman, joka vauhdittaa yhtiön teollisten ALD-ratkaisujen tuotekehitystä ja näyttötuotannon kehittämistä Beneqin Espoon tehtaalla. Investointiohjelma mahdollistaa nopeamman kasvun Beneqin strategiassa määritellyillä kasvualueilla, kuten puolijohdeteollisuuden uusissa ALD-ratkaisuissa ja autoteollisuuteen soveltuvissa läpinäkyvissä näytöissä. Uudet omistajat investoivat jo viime vuonna Beneqin käyttöpääomaan ja omavaraisuusasteen parantamiseen. Yhdessä aiempien sijoitusten kanssa nyt julkistettu investointiohjelma nostaa investointien summan yli 20 miljoonaan euroon.

11 April 2019 Equipment

Proper environmental encapsulation of circuit boards and tin whisker suppression are essential for assuring high reliability of electronics applications in harsh environments. Atomic Layer Deposition offers the best available protection without the drawbacks of parylene coatings.

18 March 2019 Beneq

In industrial applications, and specifically in semiconductor processing equipment applications, damage and failure of metal components results from exposure to reactive chemicals. Atomic layer deposition (ALD) offers qualities that enable the deposition of high-quality anti-corrosion barrier layers.

21 December 2018 Beneq

Beneq is a smart materials company that is all about durability and long product lifecycles. It is in our blood to always optimize the use of raw materials and not to create unnecessary waste.

Furthermore, Beneq was born global and almost all our turnover still comes from outside Finland. Our customers have always been from the world over and from many different cultures.

15 November 2018 Equipment

Atomic Layer Deposition (ALD) is an unmatchable moisture barrier and encapsulation solution for electronics and semiconductor components. The ultra-thin ALD moisture protection can be applied in different phases of the production process: wafer-level, chip-level, package or module-level, and/or Assembled Printed Circuit Board (PCBA) level.

15 November 2018 Equipment

Atomic Layer Deposition (ALD) is truly the ultimate moisture barrier. With ALD, it is possible to create moisture barriers that are thinner and keep humidity and vapors out better than other hermetic packaging options. ALD offers the only way to create conformal ultra-thin protective coatings on surfaces with high aspect ratios and complex 3D shapes. ALD is also a great solution for encapsulating sensitive surfaces.

28 September 2018 Beneq

Beneq® Corporation, a leading supplier of Atomic Layer Deposition (ALD) equipment and thin film coating services, and the world’s premier manufacturer of thin film electroluminescent displays, today announced a share purchase agreement about the acquisition of all Beneq Oy shares. The agreement will enable faster expansion in Beneq’s key markets and additional investments in industrial ALD thin film solutions and transparent displays.

11 September 2018 Services

Reliable, quality maintenance from Beneq Lifecycle Services guarantees you will get the most out of your ALD equipment investment with reduced downtime. Take a look at our maintenance services FAQ.

3 September 2018 Beneq

Beneq is an international workplace on a global market. Last year, 97% of our turnover came from countries outside Finland. We have long believed that to succeed with our growth plans we need to find the best experts from around the world and hire whoever gets the job done regardless of where they come from or how they look like. It is in our character.

Therefore, we were happy to join the Work Does Not Discriminate campaign launched by the Confederation of Finnish Industries (EK).

2 August 2018 Equipment

With an extremely thin ALD coating, you can block moisture effectively and minimize electronic component maintenance.

11 July 2018 Beneq

We are playing the ALD game with the largest companies in the world. On the Fortune 100 list of world’s biggest enterprises, there are 27 Beneq customers.

Of the companies on the Fortune 500 list, our Thin Film Solutions business unit has been working with 59. Our Lumineq Displays have 37 Fortune 500 customers.

12 June 2018 Beneq

Beneq was proud to invite Dr Tuomo Suntola, the 2018 Millennium Technology Prize winner for his innovative atomic layer deposition (ALD) technology, back to the building where production of his revolutionary ALD electroluminescent displays started.

25 May 2018 Beneq

In case you have not noticed, the European Union is today introducing new data protection legislation, called the EU General Data Protection Regulation (GDPR). We try to minimize the fuzz around this (in practice, nothing changes with GDPR, really), but we thought we will anyway write a short note to address the new requirements and provide you with information about the data we process.

23 May 2018 Beneq

The President of the Republic of Finland Mr Sauli Niinistö presented the eighth Millennium Technology Prize in Helsinki yesterday to Dr Tuomo Suntola, the inventor of Atomic Layer Deposition. Beneq congratulates Dr Suntola for the Millennium Technology Prize and the thanks for his pioneering work on behalf of the whole ALD community!

17 May 2018 Equipment

There is a need for lithium-ion batteries that can be charged faster in a safe manner, and that do not experience capacity loss due to charging and discharging them over and over again. Luckily atomic layer deposition (ALD) can solve many of the issues the Li-ion batteries are faced with. Beneq’s WCS 600 roll-2-roll equipment can easily and quickly coat electrode or separator sheets. If you want to be a technology leader in safer, high-performing batteries, ALD is the answer!

9 April 2018 Equipment

Beneq C2 wins the High-Volume Manufacturing Award in the CS International Conference. Beneq C2, the automated wafer ALD solution in Beneq’s cluster-compatible equipment portfolio, is the winner in the High-Volume Manufacturing category of the CS Industry Awards, where the industry experts have been able to vote for their favorites.

15 March 2018 Research

Markus Bosund will be defending his PhD thesis on atomic layer deposition (ALD) and nanotechnology on Friday, March 23, at Aalto University.

7 March 2018 Equipment

Atomic layer deposition (ALD) takes moisture protection to a completely new level by providing pin-hole free coating on even the most complex high ratio surfaces.

5 March 2018 Equipment

Learn how you can achieve cost-effective atomic layer deposition (ALD) film growth with continuous roll-to-roll systems.

28 February 2018 Services

We are adding a new information channel for everybody interested in Atomic Layer Deposition: The Beneq Thin Film Solutions webinar series. The two first ones have been published already and you can now register through our webinar webpage. Please join to learn more about the possibilities of ALD.

16 February 2018 Services

At the Beneq factory, the Home of ALD, we have worked with a huge amount of Atomic Layer Deposition applications on a multitude of materials. But which are the most common, popular and typical industrial ALD applications? This is the Top 3 of most popular industrial ALD applications.

24 January 2018 Services

Beneq, the leading global supplier of atomic layer deposition (ALD) equipment and thin film coating services, and world's premier manufacturer of thin film electroluminescent displays, today announced further investments in ALD coating services and outsourced thin film coating production and the appointment of Erik Østreng as Head of Coating Services.

18 January 2018 Services

Sterling silver is a beautifully versatile material and an invaluable component of multiple industrial applications. Silver does have its weakness, though – its lovely luster doesn’t last long without protection.

14 December 2017 Equipment

When we talk about ALD throughput, we must consider many different factors of the production setup. There is of course the deposition rate of the actual ALD process , but you should also consider the capacity of the chamber (the batch size) and the automation solutions. Things like heating the wafers to the process temperature and the cooling time after the processing matter a lot when we count the total throughput.

30 November 2017 Beneq

Saturday November 18th was a big day here in Espoo. The new west metro extension from Helsinki was opened. It was a long wait, but you can now take the subway to the Beneq factory from the Helsinki city center.

Like we mentioned when the underground started to operate, our metro is yellow, but we welcome the orange one to our neighborhood.

Maybe the next generation metro cabins will have a yellow transparent display in the windshield?

13 November 2017 Equipment

In Semicon Europa, the largest microelectronics event in Europe, 14-17, November, Munich, Germany, Beneq will launch Beneq C-Series, a new Cluster-Compatible ALD product family for high-volume manufacturing of wafers. This is the start of a throughput revolution for ALD in new More than Moore wafer processing markets.

12 October 2017 Equipment

Beneq is on a mission to introduce ALD to a whole new set of industrial applications. Next, our plan is to start a throughput revolution in ALD for the semiconductor industry.

25 September 2017 Equipment

Due to the complex 3D shape of optical lenses, they cannot be coated with high uniformity using conventional technologies like PVD. The best way to conformally coat complex 3D shapes is with ALD technology. Optical ALD coating is created one layer at a time, resulting in pinhole-free conformal films.

12 September 2017 Services

The invisible ALD coatings are everywhere around us, but most people, even technology experts, don't know about them. Last week, we talked about the benefits of ALD coatings in batteries. In today's blog post we list some more examples of customer benefits of atomic layer deposition. Corrosion protection gives longer product life, encapsulation allows better product quality, buffer layers mean more efficient products that are cheaper to manufacture. And so on.

6 September 2017 Services

Customer benefits of atomic layer deposition: An ultra-thin ALD anti-corrosion coating on the critical battery parts increases the lifetime of advanced batteries. It has been shown with lithium-ion batteries (which are the most popular kind right now) that ALD coatings on the electrodes can significantly increase the product lifetime of the battery.

28 August 2017 Beneq

Beneq is set for the next growth phase. We have ambitious development plans in both our business units – Thin Film Solutions and Lumineq Displays – and we are now starting a large recruitment campaign for building the talent pool we will need to realize our growth plan. Fancy a ride? Apply now and make Finnish high-tech history!

11 July 2017 Research

One of the main ALD events of the year, ALD 2017, the 17th International Conference on Atomic Layer Deposition, is about start in Denver, Colorado. Beneq is again a platinum sponsor and we will have lots of activity at the event.

14 June 2017 Beneq

The story of Beneq is so interweaved in Finnish industry history that it is difficult to know where to start telling this tale of our company. We will start from 1984.

6 June 2017 Beneq

Beneq’s financial figures from 2016 show growth, encouraging signs of transformation, positive development in industrial ALD solutions and a strong commitment to future growth and development.

5 June 2017 Equipment

Next week will be a big event week again for our Thin Film Solutions team. The main event will be the Baltic ALD conference in Sweden where Beneq is a Gold Sponsor.

The event will take place from June 11th to June 14th at the Konsert och Kongress venue in Linköping, Sweden.

30 May 2017 Equipment

Beneq and Aalto University's Electron Physics Group studied how Spatial ALD (SALD) can provide surface passivation of planar and black silicon (b-Si), and the results were excellent! Spatial ALD not only provided as efficient surface passivation as temporal ALD, but it also performed faster - the passivation line speed was 9 m/min!

9 May 2017 Services

Today we’re talking to Dr Mikko Söderlund, Head of Industrial Solutions at Beneq, to find out more about opportunities of ALD in flexible electronics. How do flexible electronics benefit from ALD? How fast would OLEDs deteriorate without encapsulation?

24 April 2017 Beneq

The Beneq factory has a long history of ALD (approximately one billion seconds, in fact). Today, it is the largest ALD-dedicated production facility in the world.

During the years, many visitors have enjoyed our factory tour and found what we do fascinating, and all our customers and friends are always welcome to pay us a visit. We understand, however, that not everyone can come over to Finland to visit our factory, and have decided to build a virtual tour.

11 April 2017 Equipment

We’ve talked about how atomic layer deposition (ALD) coating creates a strong, uniform, and pinhole-free barrier that protects even the most complex materials from corrosion and moisture. The same ALD coating method can also be used to coat materials such as fine powders.

5 April 2017 Research

It’s a small world, and it’s rapidly getting smaller, especially in emerging technologies. The tiny parts of today's nanotechnology solutions may be just barely visible, but they have mountainous differences in surface structures, with sharp edges, steep slopes, deep trenches and gate oxides concentrated in a single area. These types of complex surfaces with high aspect ratio (HAR) features require incredibly precise processing; you want those steep slopes and deep trenches conformally protected, too.

28 March 2017 Equipment

Beneq ALD coatings bring competitive advantage in many areas. New thin film customer cases about the benefits of ALD and the advantages it brings for our customers’ end products are now available on the Beneq website.

23 March 2017 Research

A multitude of universities and industrial research laboratories use Beneq ALD reactors for advanced thin film research. Keep up with the latest research on the Beneq Research World website.

8 March 2017 Equipment Thin Film Solutions will be at the SEMICON exhibition on March 14-16 at the Shanghai New International Expo Center introducing our latest products for industrial customers who require low cost in high volume manufacturing.

If you are around, come and meet us at our stand (Hall W11, booth #1135).

17 February 2017 Equipment

Beneq specializes in high-capacity and high-throughput ALD solutions. In the past, we have talked about how our new spatial ALD solutions are changing the units for ALD deposition area.

15 February 2017 Beneq

At Beneq, we are constantly trying to find new ways to serve our old, new and potential customers better. This means regularly reviewing all our customer engagement points and collecting feedback about the service we offer, from sales and marketing to research and after sales services.

16 January 2017 Equipment

It is well known in the electronics and display industries that atomic layer deposition is ideally suited for demanding thin film encapsulation applications.

Thanks to the conformal and pinhole-free nature of the ALD process, already very thin (less than 30 nm thick) inorganic layers of Al2O3 have been demonstrated to reach ultra-barrier performance (10-6 g/m2/day) on flexible substrates.

22 December 2016 Beneq

2016 has been an interesting year at Beneq.

21 December 2016 Research

We don’t have ping pong tables, game rooms or exotic company retreats at Beneq so we might not be able to compete with all the hottest start-ups when it comes to benefits. But we do get to participate in extremely interesting customer projects and work with the coolest of new high technology. Our daily work involves flexible electronics, jewelry, advanced engines, night-vision equipment, aerospace parts, supercapacitors and other high technology that only a few people ever see. We also get to work a lot with advanced solar cells.

1 December 2016 Beneq

Our work at Beneq is all about saving the world’s scarce resources and making long-lasting products. We are experts on smart use of materials. Conformal thin films, which are deposited atom layer by atom layer, are the ultimate precision barriers of protection. They make our customers’ products function better and last longer.

18 November 2016 Services

The fastest growing business area for Beneq right now is our Coating Services. It is the easiest way to get a new conformal coating to the market. It suits well customers who are looking for a thin film solution without initial capital investments.

8 November 2016 Equipment

Ever since we earlier this year announced the licensing of rotary spatial ALD technology and launched Beneq R11, our new rotary tool for plasma enhanced spatial ALD, we have received a steady flow of inquiries and questions about where we see the new equipment being the most useful.

1 November 2016 Beneq

Beneq as a company is all about resource savings, durability and more efficient use of energy. We are experts on smart use of materials that make our customers’ products function better.

ALD improves the efficiency of energy production and reduces energy consumption in the world. ALD allows wiser use of precious raw materials, protects products and makes them last longer. ALD also makes electronics and optics more efficient and resilient. That saves energy too.

14 October 2016 Research

High film quality and coating conformality are key drivers for the adoption of ALD processes in the energy, lighting and display industries. Large-area industrial ALD has many interesting new application areas: thin film encapsulation, anti-reflection coatings, surface passivation, buffer layers, flexible moisture barrier films, powder functionalization…

28 September 2016 Equipment

According to recent industry news, smartphone market leaders, such as Apple, Samsung and LG, are planning to adopt ALD-based thin film encapsulation solutions for flexible AMOLED displays. Details of the plans have not been confirmed, but this is nevertheless exiting news for the whole ALD community. It shows the potential of atomic layer deposition in addressing consumer product challenges and means a huge leap forward in the addressable market size of ALD.

21 September 2016 Services

Electronic components and devices do not tolerate hot and humid conditions. Most people know this and avoid exposing electronics to vapors and liquids.

But we all know that sometimes humid things just happen: phones fall into toilets from shirt pockets, swimming suits are accidentally put in the same bag with a computer, equipment is forgotten outside in the rain...

This is why companies across many industries struggle to provide moisture and corrosion protection for printed circuit boards and electronic components.

8 September 2016 Research

A very interesting doctoral dissertation in the field of semiconductor technology will be defended tomorrow in the Department of Micro- and Nanosciences of Aalto university School of Electrical Engineering.

30 August 2016 Research
Beneq large-area spatial ALD prototype for high-throughput coating

We had a great time in the ALD2016 Conference in Dublin in July and great conversations in the Beneq ALD Boat Bar that became an instant classic. There were so many great presentations in the conference that you simply couldn’t follow all the tracks and certainly could not stop and discuss all the poster presentations in detail.

In case some of you missed the opportunity to check the three Beneq presentations at the event, we are sharing them here at the blog just to make sure.

21 July 2016 Equipment
Beneq R11 - ultra-fast spatial ALD

We are all set for ALD2016, the 16th International Conference on Atomic Layer Deposition, in Dublin next week. It is time for exciting product news.

30 June 2016 Beneq

The ALD event of the year is approaching. As you know, Beneq is a platinum sponsor of ALD 2016 (the 16th International Conference on Atomic Layer Deposition), which will be held at the Convention Centre Dublin, Ireland, 24-27, July 2016.

3 June 2016 Equipment

During the past months, there has been talk about our new exciting spatial ALD equipment, which will once again make ALD bigger, faster and more flexible. It is now time to go a little bit deeper in the details of the results of our test runs with the equipment. We have now verified the process quality, conformity of coatings and the coating speed. It looks promising!


2 June 2016 Services
Beneq Development Services perform outsourced ALD material research projects.

A growing part of Beneq’s business comes from services. Our complete thin film service concept, Thin as a Service, which we launched last year, has been received well.

3 May 2016 Services
Beneq Blog - Optical ALD coatings on glass tubes

One of the reasons for this blog is to explain where atomic layer deposition can be used. The plan is to share as many examples from the industry as we can. Earlier we shared examples of industrial use of ALD in moisture barriers. Now we continue with another typical area of ALD applications: Optical coatings.

20 April 2016 Beneq

We have a lot of visitors at the Beneq factory again this week. Today started a very interesting conference where members and partners of the EU-funded PLIANT project for Process Line Implementation for Applied Surface Nanotechnologies gather at Beneq to share the latest advances in the project.

13 April 2016 Equipment
Beneq Lotus rotary ALD

We have been sharing stories about our spatial ALD equipment in this blog a few times (it is an important and expanding part of our product portfolio). Now there is more to tell again.

5 April 2016 Beneq
Beneq is a platinum sponsor of ALD2016

One of the main ALD events of the year, the 16th International Conference on Atomic Layer Deposition, ALD2016 Ireland, is approaching. Beneq is a platinum sponsor at the event and we will have lots of activity at the site and around it.

We now also know that we will have three presentations at the event. Here is a sneak preview of the contents of what we will be presenting:

Development of the world's most transparent display - enabled by ALD

8 March 2016 Services

Earlier in this blog, we have told many stories about our displays and thin film coating solutions in extreme conditions. Lumineq displays have been flying high in aircrafts, entered the Amazon rainforest in helicopters and running on fuel cells in Alaska.

4 February 2016 Equipment
Beneq Spatial ALD team with a large-area thin film substrate.

In November last year, we shared the first news about our new spatial ALD equipment that works with moving sheet substrates. We also promised our dear readers more information later about how we would make spatial ALD bigger, faster and more flexible. Now we have been running pilots with different materials for a couple of months, and it is time to keep that promise and share more details.


First, let’s talk about substrate size.

1 February 2016 Beneq

One of the main events in the world of atomic layer deposition this year is the 16th International Conference on Atomic Layer Deposition, which will be held July 24-27 in Dublin, Ireland.

Beneq will participate in ALD 2016 as a platinum sponsor. We are pleased to invite you to visit us in Dublin.

11 January 2016 Services
Planetoid Valleys necklace protected with Beneq nJEDI anti dark side treatment.

It is a well-known fact that atomic layer deposition provides the ultimate protection against moisture, corrosion and tarnishing.

But did you know that ALD can also protect against dark forces?

7 January 2016 Services
Beneq WCS roll-to-roll ALD system at CPI

Welcome back. Our blog returns after the holiday break with more stories from the home of ALD.

We start the new blog year with partner news: The Centre for Process Innovation (CPI) and Beneq have signed a long term collaboration agreement for the use of atomic layer deposition (ALD) technologies.

18 December 2015 Beneq

Saving the world’s resources by miniaturizing and digitalizing everything with new solutions and innovative technologies is at the core of our thinking at Beneq.

Atomic layer deposition is about making the world thinner. It saves material. We also make electronics, optics and for example solar cells more efficient and durable. That saves energy.

Our displays are the most durable in the business. The long life cycles reduce the need for replacement parts. It saves resources too.

14 December 2015 Beneq
Jukka Nieminen, President of Beneq Oy, and Sampo Ahonen, Chairman of Beneq Oy

Earlier today it was announced that Beneq will get a new President starting January 1st. You can check the facts from the official news release.

This is a big change for Beneq and all of us. Sampo has been the CEO since Beneq was founded ten years ago. As one of the founders and the first and only CEO of Beneq so far Sampo has played a crucial role in what Beneq has become. In many ways, he is the face of Beneq to the outside world.

10 December 2015 Services
Beneq Blog - A billion times better? A moisture barrier comparison

In a blog post earlier this week, we discussed moisture barriers and explained how atomic layer deposition can be used to protect electronics from humidity.

When we talk about thin film coatings and moisture protection of electronics, there are of course various technology alternatives to ALD. We believe that ALD offers encapsulation properties that are far superior to the competing technologies, but we understand that it is sometimes difficult to grasp the differences between the alternatives.

8 December 2015 Services
Beneq Blog - Dry Stories, examples of industrial use of atomic layer deposition

In a blog post a couple of weeks ago, we mentioned that we are often asked to explain what our ALD equipment can be used for. In this post, we will give a couple of examples more. This time we will talk of an industrial ALD application that is quite common and can take many forms: moisture barriers.

26 November 2015 Research

One of the most common questions we get here at Beneq is: What are the Beneq tools used for?

More and more Beneq equipment is used for industrial applications that improve the characteristics of our customers’ end products, but there are also many Beneq tools out there that are used for research of all kinds. 

23 November 2015 Services
Beneq Thin as a Service™ - Complete service solution for atomic layer deposition

The world is getting thinner. The never-ending quest to miniaturize and digitalize everything while saving our limited resources requires innovative technologies that allow creating ultra-thin reflecting layers, strengthening coatings, nanolaminates and protective barriers in spaces where just a few years ago nobody imagined it would be possible to operate.

Atomic layer deposition, ALD, is such a technology.

13 November 2015 Equipment
Beneq introduces new industrial equipment for fast large-area spatial ALD.

Atomic layer deposition, ALD, is an exciting technology for anybody looking for extremely thin pinhole-free and totally conformal coatings. It is already in use with great results in a variety of applications from photovoltaics to flexible electronics and from anti-tarnish treatment of jewelry to LED efficiency improvements.

Sometimes, however, the batch production that has been typical in ALD manufacturing comes with size and capacity limitations.

9 November 2015 Beneq

When you visit our factory in Espoo and enter the clean room area where we keep our 40 ALD machines, one thing you will notice is the constant ticking sound from the conventional batch ALD equipment. Those are the pulses of precursor gases in the equipment chambers ticking. Tick. Tick. Tick.

Combined with the humming background noise of the ventilation system and the vacuum pumps, it is a rather relaxing sound. It is one of the very characteristics that define the atmosphere of the factory floor.

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