High Aspect Ratio (HAR) reaction chamber

Beneq has a series of reaction chambers specifically designed for coating  demanding high aspect ratio (HAR) substrates. From surfaces with curves and holes to the most demanding HAR imaginable, you can control the precursor dwelling time without limits.

With the HAR chamber option, you get:

  • coating inside nanotubes, filters, ceramics and pores
  • no cross-contamination
  • true stop flow
  • different gas flow configuration options
  • easy maintenance of reaction chambers

 

Read more about atomic layer deposition (ALD) for high aspect ratio (HAR) structures.

Or watch a video about Beneq TFS 200 with a HAR option at University of Pardubice.

High Aspect Ratio (HAR) chamber

HAR reaction chamber detail

 

  • coating inside nanotubes, filters, ceramics and pores
  • no cross-contamination – the inert gas valve system (IGV) keeps precursor flow out of the reaction chamber
  • wide process temperature range – from O °C to 300 °C
  • proven performance up to AR of 1:3000
  • true stop flow – unlimited precursor residence time
  • different gas flow configuration options – cross flows, shower head flows, or both
  • easy maintenance of reaction chambers – easy to remove, clean, and put back

Contact Lumineq

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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