BENEQ Transform™

Versatile ALD production. Engineered.


Truly versatile.

Thermal and plasma ALD. Single wafer or batch processing. Widest range of high-performance oxides and nitrides. Maximize your options for flexible volume production.

Designed for the fab.

Industry-standard horizontal wafer loading offers plug-and-play integration. A unique preheating module eliminates waiting time and boosts throughput to a whole new level.

SEMI certified.

Fully compliant with SEMI S2/S8 and SECS/GEM standards. Customized support ensures a smooth transition to ALD in production.


Wafer level encapsulation

ALD creates best-in-class moisture barriers through dense, conformal and pinhole-free oxides and oxide laminates. Applicable to multiple categories of More-than-Moore devices, the BENEQ TransformTM is the one-stop solution for boosting your product lifetime, meeting reliability standards.

Gate dielectric for power devices

ALD enables damage-free surface preparation and high-k dielectric deposition on silicon and wide band-gap power devices. This is crucial for extracting best electrical performance. The BENEQ TransformTM uniquely combines single wafer plasma and thermal batch ALD processing to maximize throughput on the optimal gate dielectric stack.

Surface passivation for compound semiconductors

Passivation of sensitive surfaces is crucial for III-V devices based on material such as InP, GaAs, and GaN. The BENEQ TransformTM enables integrated surface preparation and passivation.

MIM capacitors for RF and mixed-signal circuit

ALD High-k dielectrics, metals and stacks help to reduce the size of metal-insulator-metal (MIM) capacitors and die. The BENEQ TransformTM integrates performance-critical preclean, metal, and dielectric depositions for the highest performance.

Transform™ Lite

  • Preheater
  • 1 Batch ALD Module


  • Preheater
  • Plasma Pretreatment
  • Batch ALD
  • Plasma ALD

Create your own Transform™

  • Preheater

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Application examples

  • Chip-level ALD moisture barrier for components on tape
  • ALD anti-corrosion coating for semiconductor equipment parts
  • ALD gate dielectric for GaN power devices
  • ALD gate insulator for displays
  • Ultimate moisture barriers for OLED micro-displays from Beneq
  • Lumineq EL40S electroluminescent display by Beneq
  • Transparent electrode for displays by Beneq ALD
  • ALD is the ultimate moisture barrier for PCBs
  • Beneq FBR ALD reactor for moisture barriers of phospor powder
  • Beneq ALD coatings offer protection against corrosion in LED packaging.
  • Beneq ALD provides metal-like coatings for watch parts and fine mechanics.
  • Beneq ALD coatings for wafer-level moisture protection
  • Beneq ALD coatings provide high-quality reflectors for LED
  • Beneq ALD coatings boost the performance of diffractive gratings
  • Beneq provides ALD coatings to protect electronics components from corrosion
  • ALD coatings provide interface layers between materials in CIGS panels.
  • Beneq ALD coatings increase the lifetime of Li-Ion batteries
  • ALD is ideal for optical filters on complex surfaces.
  • Beneq ALD optical coatings increase the lifetime of high power lasers
  • ALD-based conformal moisture barrier coatings for microchannel plates from Beneq.
  • OLED lighting encapsulation with Beneq TFS 600. Fully automated and vacuum-line integrated. For industrial OLED encapsulation.
  • X-ray imaging scintillator plate encapsulation with Beneq Coating Services and Beneq P800 batch coating products

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