3D and Batch Equipment
Largest scale, general purpose ALD production systems ideal for coating diverse substrate types and thick films. Easily scale up ALD deposition from the R&D phase to full manufacturing.
The industry standard for ALD coating of large batches and parts. Capable of ALD processes of metal oxides, rare earth oxides, nitrides, sulfides and carbides. Large enough to accomodate a variety of reactions chambers for best uniformity regardless of sample size. Patented dosing valves and Beneq’s unique backsuction feature prevent any precursor leak to the reaction chamber.See product
Built with reliability in mind, the P400A is the result of more than 20 years of ALD production experience. The P400A decouples pressure relations by using a single mass flow controller with carrier gas distribution solely by orifices. By using only solenoid type valves, ALD dosing is fast and repeatableSee product