Thermal gas line

For controlled gaseous precursors pulsing

Thermal gas lines enable gaseous precursors such as NH3, H2S, and SiH4 being pulsed into the ALD reaction chamber in a controlled way.

The thermal gas line options support the excellence and modularity of the TFS 200 research platform:

• Different gas line options are available for any ALD compatible gaseous precursor
• Gas line options include the necessary additional hardware and software
• Depending on the precursor type, there are two levels of safety for thermal gas line options available (non-hazardous or flammable/toxic)

TGL-1 Gas Line

For N₂, O₂, H₂ or Ar.

Includes:

• Pneumatic pulsing valve, stainless steel tubing with VCR connectors, and orifice for flow adjustment
• Hardware and software interlocks for non-compatible gas combinations

Please note that Beneq requires the use of gas detection and alarm systems in combination with hazardous gases (detectors can be separately purchased from Beneq).

TGL-2 Gas Line for flammable/toxic gases

For NH₂, H₂S, Si_xH_y or WF₆.

Includes:

• Pneumatic pulsing valve, stainless steel tubing with VCR connectors, and orifice for flow adjustment
• Hardware/software interlocks for non-compatible gas combinations
• Double interlock valves on the gas supply
• Integrated purge line with automated purge control

Please note that Beneq requires the use of gas detection and alarm systems in combination with hazardous gases (detectors can be separately purchased from Beneq)